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在密集波分复用系统中,多波长DFB激光器阵列与多模干涉耦合器集成光源器件具有重要的应用前景.为了研制多波长集成光源中的宽带可用低损耗光耦合器,利用三维有限差分光束传播法仿真设计了一种具有强限制作用的InP/InGaAsP材料的多模干涉型耦合器.输入/输出端波导均采用楔形结构以降低多模干涉型耦合器的插入损耗,提高各个输出端口的出光平衡度.根据仿真结果,结合波导芯层为采用外延生长设备,采用反应离子刻蚀工艺制作了1×乘4多模干涉型耦合器.利用自动对准波导耦合测试系统对所制作器件的插入损耗和出光平衡度进行测量.测试结果表明,该器件在1 550nm波长附近的40nm带宽范围内获得了约2.6dB的通带平坦度,在1 550nm通信波长处,器件的插入损耗低于10dB.
In dense wavelength division multiplexing system, multi-wavelength DFB laser array and multi-mode interference coupler integrated light source device has an important application prospect.In order to develop a wideband available multi-wavelength integrated light source low-loss optical coupler, the use of three-dimensional finite difference beam Propagation method simulation designs a kind of multi-mode interference coupler with strong limit InP / InGaAsP material.The input / output waveguides adopt the wedge structure to reduce the insertion loss of the multimode interference coupler and improve the performance of each output port According to the simulation results, a 1 × by 4 multimode interference coupler was fabricated by using reactive ion etching process in combination with the waveguide core by using epitaxial growth equipment.Automatic alignment waveguide coupling test system was used to fabricate the device Insertion loss and light balance.The test results show that the device achieves a passband flatness of about 2.6dB in the 40nm bandwidth near the wavelength of 1 550nm and the insertion loss of the device below 10dB at the communication wavelength of 1 550nm .