由地高频辐射对人体造成危害,对无线电产生干扰,因此,溅射台的屏蔽是很重要的。我们所使用的JS—450溅射台是早期产品,对防止高频辐射问题没有充分的考虑,虽然高频电源机柜的屏蔽是比较好的,可是能量传输是用空气绝缘的刚性同轴线,中间有垂直接头以及同轴线与靶电极的连接等处 Radiation from high-frequency radiation on the human body harmful to the radio interference, therefore, the sputtering station shielding is very important. The JS-450 sputtering table we used was an early product and did not give sufficient consideration to prevent the problem of high frequency radiation. Although the shielding of the high-frequency power supply cabinet is relatively good, the energy transmission is rigid coaxial with air insulation, The middle of a vertical connector and the coaxial electrode and the target electrode connection and so on