论文部分内容阅读
研究了一种由单幅静态干涉图测量球面曲率半径的方法。针对小曲率半径(R<50 mm)的球面,用林尼克干涉显微镜得到被测球面的静态干涉图。基于阻尼最小二乘法,拟合干涉条纹的光强曲线,得到被测小球面面形的多项式表达式,并由此计算出被测件的曲率半径。讨论了算法初值的选取方法,验证了算法精度并分析了误差因素。对比实验表明,本方法的与其他测试方法取得的结果相吻合。
A method of measuring the radius of curvature of a sphere by a single static interferogram is studied. For the sphere with small radius of curvature (R <50 mm), a static interference diagram of the measured sphere is obtained using a Lychnik interference microscope. Based on the damped least square method, the light intensity curve of the interference fringes is fitted to obtain the polynomial expression of the measured spherical surface and the radius of curvature of the measured object is calculated. The selection method of the initial value of the algorithm is discussed, the accuracy of the algorithm is verified and the error factor is analyzed. Comparative experiments show that this method is consistent with the results obtained by other test methods.