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随着高折射率浸没式光刻看起来并不比其他光刻方案更有希望,业界现在开始热烈地讨论双重图形,想以此作为拓展水浸式光学光刻强有力的方法
With high refractive index immersion lithography does not look promising than other lithography options, the industry is now beginning to talk about dual graphics enthusiastically as a powerful way to expand immersion lithography