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5. New method for determination of arsenic contentin tail gases during semiconductor processing

New method for determination of arsenic contentin tail gases during semiconductor processing

来源 :环境科学学报：英文版 | 被引量 : 0次 | 上传用户：wangxiaoxiao880523

【摘 要】

：

ＮｅｗｍｅｔｈｏｄｆｏｒｄｅｔｅｒｍｉｎａｔｉｏｎｏｆａｒｓｅｎｉｃｃｏｎｔｅｎｔｉｎｔａｉｌｇａｓｅｓｄｕｒｉｎｇｓｅｍｉｃｏｎｄｕｃｔｏｒｐｒｏｃｅｓｓｉｎｇＷｅｎＲｕｉｍｅｉ，ＰｅｎｇＹｏｎｇｑｉｎ（Ｉｎｓｔｉｔｕｔｅｏｆｍｉｃｒｏｃｏｎｄｕｃ...

【出 处】

：

环境科学学报：英文版

【发表日期】

：

1995年2期

【关键词】

：

ARSENIC TAIL gasesi SEMICONDUCTOR processing. arsenic   tail gasesi semiconducto 

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ＮｅｗｍｅｔｈｏｄｆｏｒｄｅｔｅｒｍｉｎａｔｉｏｎｏｆａｒｓｅｎｉｃｃｏｎｔｅｎｔｉｎｔａｉｌｇａｓｅｓｄｕｒｉｎｇｓｅｍｉｃｏｎｄｕｃｔｏｒｐｒｏｃｅｓｓｉｎｇＷｅｎＲｕｉｍｅｉ，ＰｅｎｇＹｏｎｇｑｉｎ（Ｉｎｓｔｉｔｕｔｅｏｆｍｉｃｒｏｃｏｎｄｕｃ...

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