论文部分内容阅读
滚动轴承是机械工业的基础元件,波及机械工业各个领域。普通的轴承承受着载荷的实时工作状态很难精确测定。基于微机电的薄膜传感器智能轴承技术,能实现轴承的实时在线自诊断,防止轴承失效及其引起的机器失效。本文介绍了基于微机电薄膜传感器的智能轴承的结构及组成,着重探讨了应用于智能轴承的薄膜传感器的特点、种类、安装形式,并指出智能轴承用薄膜传感器制备的关键技术问题。
Rolling bearings are the basic components of the machinery industry, affecting all areas of the machinery industry. Ordinary bearings to withstand the load in real-time working conditions is difficult to accurately determine. Based on micro-electromechanical thin film sensor intelligent bearing technology, bearing real-time online self-diagnosis can be realized to prevent the bearing failure and its failure caused by the machine. In this paper, the structure and composition of smart bearings based on MEMS sensors are introduced. The characteristics, types and installation of the sensors for smart bearings are emphatically discussed. The key technical issues of the smart sensor film sensors are also pointed out.