扫描电子显微镜问世以来,各国科学家进行了大量的研究工作以提高其性能,如光源、光学系统的优化和新型探测器的研究等改善了电镜的性能[1-2]。利用背反射电子信号进行样品表面的元素成分分析时,因受表面形貌起伏的影响,其信号强度与平均原子序数的对应关系有可能遭到破坏。利用 Since the advent of scanning electron microscopy, scientists from all over the world have done a great deal of research work to improve their performance. For example, the optimization of light sources and optical systems and the research of new detectors have improved the performance of electron microscopes [1-2]. When backscattered electron signals are used to analyze the elemental composition of the sample surface, the correspondence between the signal intensity and the average atomic number may be damaged due to the influence of surface topography. use