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伺服阀力矩马达气隙是影响电液伺服阀性能的重要因素.本文建立了一套基于显微视觉的力矩马达气隙检测平台,形成了集高效自动对焦、图像特征提取与检测于一体的视觉测量方法,其自动聚焦重复精度为7.9μm,聚焦时间仅需16 s,测量精度与工具显微镜相当,而测量时间大幅度缩短,显著提高了工作效率;利用关系型数据库技术,实现测量数据存储、报表生成、图形化及分析,能根据气隙变化检测结果快速进行误差评判,并给出工艺修正建议,为伺服阀的精密装调提供多方面实验依据.
Servo valve torque motor air gap is an important factor affecting the performance of electro-hydraulic servo valve.In this paper, a micro-vision-based torque motor air gap detection platform has been set up to form a set of high-efficiency auto-focus, image feature extraction and detection in one of the visual Measurement method, the automatic focusing repeat accuracy of 7.9μm, focusing time of only 16s, the measurement accuracy and the tool microscope, while the measurement time is significantly reduced, significantly improve the work efficiency; the use of relational database technology to achieve the measurement data storage, Report generation, graphing and analysis, can make error judgment quickly according to the result of air gap change detection, and give suggestions of process correction, providing experimental basis for precise setting of servo valve.