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采用Mo离子注入工艺对YG6硬质合金基体表面进行处理 ,用微波等离子体CVD(MPCVD)法沉积金刚石涂层 ,研究了Mo离子注入工艺对金刚石涂层附着性能的影响 .结果表明 ,Mo离子注入后 ,硬质合金基体表面的化学成分发生了明显变化 ;采用适当剂量的Mo离子注入基体 ,可使CVD金刚石涂层的附着性能显著提高 .
The surface of YG6 cemented carbide substrate was treated by Mo ion implantation, and the diamond coating was deposited by microwave plasma CVD (MPCVD) method.The effect of Mo ion implantation process on the adhesion of diamond coating was studied.The results show that Mo ion implantation , The chemical composition of the cemented carbide substrate surface has changed significantly. The injection of Mo ions into the substrate can significantly improve the adhesion of the CVD diamond coating.