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本文对集成光学中制作平面光波导用的LiNbO_3薄膜制备及其光参数的测量方法进行了介绍。RF二极管溅射沉积的LiNbO_3单晶薄膜的寻常光及非寻常光折射率高达:n_0=2.32±0.02;n_e=2.18±0.04(He-Ne激光)。用LiNbO_3膜可制作出光传输损耗不超过1dB/cm(He-Ne激光)的薄膜光波导。用外扩散LiNbO_3平面光波导可制作出高效率、宽带的电光相位调制器。其调制率η与电压之比为0.13V~(-1),50Ω负载时最大带宽为3.2GHz。η=1rad时,每单位带宽的调制功率为0.19mW/MHz。另外,用内扩散工艺制作的Ti:LiNbO_3光波导可制作出集成声光调制器。与块体型声光双稳态器件相比,其体积尺寸以及功耗要小得多。最后,对迄今为止获得的研究结果进行了简要的讨论分析。
This paper introduces the preparation of LiNbO_3 thin films for the fabrication of planar optical waveguides and the measurement of their optical parameters in integrated optics. The ordinary and extraordinary refractive index of the sputtered LiNbO_3 single crystal thin films with RF diode are up to: n_0 = 2.32 ± 0.02; n_e = 2.18 ± 0.04 (He-Ne laser). Thin film optical waveguides with an optical transmission loss of not more than 1 dB / cm (He-Ne laser) can be produced using a LiNbO 3 film. Out of diffusion LiNbO_3 planar optical waveguide can produce high efficiency, broadband electro-optical phase modulator. The modulation ratio η and voltage ratio of 0.13V ~ (-1), 50Ω load maximum bandwidth of 3.2GHz. At η = 1 rad, the modulation power per unit bandwidth is 0.19 mW / MHz. In addition, Ti: LiNbO_3 optical waveguides fabricated by the internal diffusion process can produce an integrated acousto-optic modulator. Compared to bulk acoustic-bistable devices, their size and power consumption are much smaller. Finally, the research results obtained so far are briefly discussed and analyzed.