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介绍一种 TiC/i－ C双层复合硬质薄膜，该复合膜由碳化钛（ TiC）膜层和 i－ C（离子辅助沉 积）无定形硬质碳膜组成。采用反应磁控溅射的方法沉积碳化钛（ TiC）膜层。随后在维持镀膜系 统真空度的情况下，利用等离子体分解结合高能离子轰击的方法不间断地连续制备 i－ C类金刚 石薄膜。 TiC膜层对金属基片和表面 i－ C膜层都有良好的附着与结合强度， 因此被用作中间过 渡层，而表面 i－ C膜层则保持了 DLC薄膜硬度高和摩擦系数小等优良的性能。对 TiC/i－ C复 合膜的机械性能和摩擦学行为的测试显示该复合膜具有非常高的显微硬度及优良的摩擦学特性， 诸如很高的抗附着磨损、磨耗磨损、划痕磨损的性能及很低的摩擦系数。与 TiC单层膜与 DLC单 层膜比较，显示该 TiC/i－ C复合膜更能适合实际应用的需要，在国民经济中将有广阔的应用前景。
A TiC / i-C dual-layer composite hard film is described. The composite film is composed of a TiC film and an i-C (ion-assisted deposition) amorphous hard carbon film. TiC films were deposited by reactive magnetron sputtering. Subsequently, while maintaining the vacuum degree of the coating system, the continuous and continuous preparation of the i-C diamond-like carbon film was carried out by means of plasma decomposition combined with high-energy ion bombardment. TiC film on the metal substrate and the surface of the i-C film has good adhesion and bonding strength, it is used as an intermediate layer, while the surface i-C film while maintaining the DLC film hardness and low friction coefficient Excellent performance. Testing of the mechanical properties and tribological behavior of the TiC / i-C composite films revealed that the composite films possessed very high microhardness and good tribological properties such as high resistance to wear, abrasion and scratch Performance and low coefficient of friction. Compared with TiC single-layer film and DLC single-layer film, the TiC / i-C composite film is more suitable for practical applications and will have broad application prospects in the national economy.