We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm.To obtain a planar waveguide,oxygen ions with an energy of 3.0 MeV and a fluence of 1.5×1015 ions/cm2 are implanted in the polished face of LiNb03 crystals.For planar waveguides,a loss of 0.5 dB/cm is obtained after annealing at 300℃for 30 min.The ridge waveguide is fabricated by the diamond blade dicing method on optimized planar waveguides.The guiding properties are investigated by prism coupling and end-face coupling methods.