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针对振动式微机械陀螺的设计过程中对微振子动态特性的精确评价问题,提出一种测量微振子动态特性的光学方法。该方法利用高速摄像机获取陀螺微振子在振动时的时间序列图像,然后采用数字图像相关技术对序列图像进行相关计算,以获得微振子在大气中振动的位移、速度和加速度曲线,并由此计算微振子的固有频率和品质因数。该方法对位移的分辨力在亚微米量级,具有较高的测量精度。对文中被测陀螺驱动模态的固有频率测量结果为2061.67 Hz,大气压下的品质因数测量结果为66.67。提出的方法可为微陀螺动态特性的测量提供一种精确、有效的途径。
Aiming at the precise evaluation of the dynamic characteristics of the micro-oscillator during the design of the vibrating micro-mechanical gyro, an optical method for measuring the dynamic characteristics of the micro-oscillator is proposed. The method uses the high-speed camera to obtain the time-series images of the gyro micro-oscillator during vibration, and then uses the digital image correlation technology to calculate the sequence images to obtain the displacement, velocity and acceleration curve of the micro-oscillator in the atmosphere and calculates Natural frequency and quality factor of micro-oscillator. The method has the resolution of submicron order of magnitude and high accuracy. The natural frequency of the tested gyroscopic driving mode is 2061.67 Hz and the quality factor at atmospheric pressure is 66.67. The proposed method can provide an accurate and effective way for the measurement of the dynamic characteristics of the micro-gyro.