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针对传统线阵CCD测量方法仅适用于静态图像采集或低速位移测量的问题,在分析CCD动态测量过程中动态误差产生原因的基础上,提出一种驱动时序互相推延的多个CCD同步测量方法。该方法实现了在一个积分周期内的等时间多个位移值测量,等效于减少单个CCD积分时间,从而提高线阵CCD的动态测量范围。设计了一个由5个线阵CCD沿圆周均布的,时序推延的角位移传感器,并完成相应实验系统的搭建。通过与高精度圆光栅在不同速度下动态误差的检定,得出随着运动速度的提高,时序推延测量方法的动态特性要明显优于传统测量方法。结果表明,时序推延测量法在30 r/min时与传统方法 10 r/min的动态误差水平相当,验证了时序推延测量方法对提高CCD动态特性的可行性。
Aiming at the problem that the traditional linear CCD measurement method is only suitable for static image acquisition or low speed displacement measurement, based on the analysis of the causes of the dynamic error in the CCD dynamic measurement process, a multi-CCD synchronous measurement method with driving timing delaying each other is proposed. The method realizes the measurement of multiple displacement values at equal time in one integration period, which is equivalent to reducing the integration time of a single CCD, so as to improve the dynamic measurement range of the linear CCD. An angular displacement sensor which is uniformly distributed along the circumference of the five linear CCDs is designed and the corresponding experimental system is completed. Through the verification of the dynamic error with the high precision circular grating at different speeds, it is concluded that with the increase of the moving speed, the dynamic characteristics of the time delay measurement method should be obviously superior to the traditional measurement methods. The results show that the time delay measurement method is equivalent to the dynamic error of 10 r / min at 30 r / min, which verifies the feasibility of the timing delay measurement method to improve the dynamic characteristics of CCD.