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将铂膜温度芯片和SOI压力芯片近距离装配在充油芯体内,进行真空充油后,温度和压力传感器芯片同时被硅油保护起来,再通过波纹膜膜片感受压力。由于温度芯片和压力芯片距离非常近,可以同时感受较小局部区域的温度信号和压力信号,解决了同时测量同一区域压力和温度信号的技术难题,同时对压力传感的温度补偿具有很好的效果。对所研制的充油式温度压力复合传感器进行了性能测试,结果表明,测试结果与设计相符,其中温度传感器的允差为A级,压力传感器的非线性优于0.2%FS,压力测量范围为0~75 MPa,工作温度范围为-50~175℃。
The platinum film temperature chip and SOI pressure chip close-up assembly in the oil-filled core, the vacuum oil, the temperature and pressure sensor chip while being protected by silicone oil, and then through the corrugated membrane to feel the pressure. Due to the very close distance between the temperature chip and the pressure chip, the temperature signal and the pressure signal of the small local area can be simultaneously sensed, thereby solving the technical problem of simultaneously measuring the pressure and the temperature signal in the same area. Meanwhile, the temperature compensation of the pressure sensing has good effect. The performance test of the oil-filled temperature-pressure composite sensor has been carried out. The results show that the test results are consistent with the design. The tolerance of the temperature sensor is Grade A, the pressure sensor’s nonlinearity is better than 0.2% FS, the pressure measurement range is 0 ~ 75 MPa, working temperature range is -50 ~ 175 ℃.