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介绍了一种二维硅热流量传感器,通过恒温差(CTD)控制模式,能同时测量风速和风向。使用四个串连的热堆测量芯片中心区域的平均温度,这种测温的方法非常简单新颖。在简单介绍CMOS硅热流量传感器的工作原理之后,主要介绍CTD驱动电路。经过风洞测试,该传感器能够测量风速0～23m/s,具有良好的线性度,并且360°方向敏感。
A two-dimensional silicon thermal flow sensor is introduced to measure wind speed and direction at the same time through a constant temperature difference (CTD) control mode. This method of temperature measurement is very straightforward, using four consecutive hot reactors to measure the average temperature in the center of the chip. After introducing the working principle of CMOS silicon thermal flow sensor briefly, mainly introduce CTD drive circuit. After wind tunnel test, the sensor can measure the wind speed 0 ~ 23m / s, with good linearity, and 360 ° direction sensitive.