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提出并实现了一种基于腔衰荡光谱(CRDS)技术的光纤微腔温度传感器。利用高频CO2激光脉冲技术在1060 nm单模光纤上直接刻蚀光学微腔,将其作为传感单元接入到光纤环谐振腔中,通过测量脉冲激光衰荡时间实现了温度传感。在24℃~93℃温度范围内,光纤微腔温度传感器灵敏度达到83.36 ns/℃,实验测量结果具有良好的线性度。
An optical fiber microcavity temperature sensor based on cavity ring-down spectroscopy (CRDS) is proposed and implemented. The optical microcavity was etched directly on 1060 nm single-mode fiber by using high-frequency CO2 laser pulse technology. The optical microcavity was connected to the fiber ring resonator as a sensing unit, and the temperature sensing was achieved by measuring the pulse laser decay time. In the temperature range of 24 ℃ ~ 93 ℃, the sensitivity of optical fiber microcavity temperature sensor reaches 83.36 ns / ℃, and the experimental measurement results have good linearity.