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介绍了静电驱动 ,电容检测的微机械振动轮式陀螺仪样机的结构 ,工作原理 ,驱动与检测电路以及实验结果 ;给出了检测电路的分辨率 ;从样机试验所观测到的试验现象和获得的特性曲线出发 ,从理论上加以分析和验证 ,得到了该陀螺样机驱动轴的非线性机械特性和检测轴分辨率 ;并提出了如何克服谐振频率不匹配的措施。指出该陀螺精度达到 1 0°～ 1°/h是可行的。
The structure, working principle, drive and detection circuit and experimental results of the prototype of the micro-mechanical vibration wheel gyro with electrostatic drive and capacitance detection are introduced. The resolution of the detection circuit is given. The test phenomena observed and obtained from the prototype test The characteristic curve of the gyroscope prototype is analyzed and verified. The nonlinear mechanical characteristics and the resolution of the detection axis of the gyroscope are obtained. And how to overcome the resonance frequency mismatch is proposed. It is feasible to point out that the gyro precision reaches 10 ° ~ 1 ° / h.