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辉光放电光谱分析是渗层逐层定量分析最有效方法之一。本文介绍了辉光灯头结构和电源,研究了辉光放电的基本特性和应用,特别是在高含量组分和渗层逐层定量分析的应用,分析结果是令人满意的。
Glow discharge spectroscopy is one of the most effective ways of layer-by-layer quantitative analysis. In this paper, the structure and power supply of the glow lamp were introduced. The basic characteristics and application of the glow discharge were studied. Especially in the application of the high content component and the layer-by-layer quantitative analysis of the diffusion layer, the analysis results were satisfactory.