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根据Sol-Gel工艺制备的ZrO2-SnO2薄膜的气敏性能数据,提出了常温下SnO2(ZrO2)薄膜对H2S的气敏机理模型.根据此模型所得定量分析结果与实验结果一致.
According to the gas sensitivities of ZrO2-SnO2 thin films prepared by Sol-Gel process, the gas sensing mechanism of SnO2 (ZrO2) thin films on H2S at room temperature is presented. The quantitative analysis results obtained by the model are consistent with the experimental results.