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利用射频磁控溅射结合水热生长两步法制备了均匀致密分布的ZnO纳米晶薄膜,并利用碳纳米管阵列场发射阴极测试了其场电子激励下的发光特性。结果表明,在电子束流激励下,ZnO纳米晶薄膜的光谱具有两个发射峰,其中黄绿峰属于缺陷发光而紫外峰来源于ZnO的内在激子,且随电子束流密度的增大紫外峰发光强度增长明显。另外,还发现ZnO纳米晶薄膜相对于常规ZnO薄膜的光谱有一定程度的红移,近紫外峰已移至紫光波段。
The ZnO nanocrystalline films were uniformly and densely distributed by two-step RF magnetron sputtering and hydrothermal growth. Their luminescence properties under field electron excitation were tested by carbon nanotube array field emission cathodes. The results show that under electron beam current excitation, the ZnO nanocrystalline thin film has two emission peaks, of which the yellow-green peak belongs to the defect luminescence and the UV peak originates from the intrinsic exciton of ZnO, and the ultraviolet peak is shining with the electron beam current density increasing Strength increased significantly. In addition, the ZnO nanocrystal film has also been found to have some red-shift toward the spectrum of the conventional ZnO thin film, and the near-ultraviolet peak has been shifted to the violet band.