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直进式聚焦X射线谱仪具有元素分析范围宽广(Be~4 ～U~(92)),波长分辩率高等优点,在近代电子探针、扫描电子显微镜及弯晶X射线荧光光谱仪上得到广泛地应用.本文探讨了有关的X射线光学与运动几何学原理,归纳了相应的聚焦公式,分析对比了Ⅰ～Ⅳ类不同运动方式的谱仪结构,导出Ⅴ类结构——一种新型的谱仪.由于它克服了钢丝绳恒长原理结构带来的弊病,理论分析表明比其它类型谱仪有优越性,看来更能满足近代电子显微分析仪器日益提高的精度要求.
The straight-in Focused X-ray spectrometer has the advantages of wide range of elemental analysis (Be ~ 4 ~ U ~ (92)) and high wavelength resolution. It is widely used in modern electron probe, scanning electron microscope and X-ray fluorescence spectrometer In this paper, the principles of X-ray optics and kinematic geometry are discussed, the corresponding focusing formulas are summarized, the structures of spectrometers of different movement modes of Ⅰ ~ Ⅳ are analyzed and compared, and the Ⅴ structure is derived - a new spectrum Because it overcomes the shortcomings of the wire rope structure of constant length principle, the theoretical analysis shows superiority than other types of spectrometer, it seems to meet the increasingly high accuracy of modern electron microscopy equipment requirements.