类金刚石碳膜以其优异的性能,诸如高电阻率、高硬度、低摩擦系数、良好的光学特性等显示出良好的应用前景,越来越受到人们的关注。本文首先利用朗谬耳探针对基底附近的等离子体特性进行了诊断,考察了离子电流密度与脉冲电压和工作气压的关系。然后在不同的气体比例下成功的制备出了DLC薄膜。采用拉曼光谱仪、原子力显微镜、纳米压痕仪等设备对薄膜的相结构、表面形貌和机械性能进行了综合分析,并研究了镀膜工艺与薄膜特性的关系。 Diamond-like carbon films have drawn increasing attention due to their excellent properties, such as high resistivity, high hardness, low friction coefficient, good optical properties and the like, which have shown good application prospects. In this paper, we first use Langmuir ear probe to diagnose the plasma characteristics near the substrate, and investigated the relationship between ion current density and pulse voltage and working pressure. Then DLC films were successfully prepared at different gas ratios. The phase structure, surface topography and mechanical properties of the films were analyzed by Raman spectroscopy, atomic force microscopy and nanoindentation, and the relationship between the filming process and the film properties was also studied.