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设计了一种基于多模干涉(MMI)耦合输入/输出结构的跑道型双微环串联谐振滤波器,并采用紫外光敏聚合物材料SU-8作波导芯层,聚合物CYTOP为下包层,在硅基底上完成了器件的制备。器件的波导端面尺寸为2μm×1μm,与设计值相符,扫描电镜显示所制备的器件波导侧壁陡直度较高。直波导传输损耗的测试结果表明,在1550 nm波长,直波导传输损耗约为2.0 dB/cm。测试并获得了多模干涉结构和器件的通光及输出光谱图。测试结果表明,MMI结构在较宽的波长范围内实现了接近50∶50的功分比,微环谐振滤波器的通光性能良好,实现了滤波功能,器件的自由光谱区FSR实际值约为0.94 nm,与设计参数值很接近。研究结果表明采用聚合物SU-8制备小波导尺寸微环谐振器的器件简便可行。
A raceway-type dual micro-ring series resonant filter based on multi-mode interference (MMI) coupling input / output structure is designed. The UV-sensitive polymer SU-8 is used as the waveguide core, the polymer CYTOP is the under cladding, The device was fabricated on a silicon substrate. Waveguide end face size of the device is 2μm × 1μm, in line with the design value, the scanning electron microscopy showed that the fabricated device waveguide sidewall steepness higher. The test results of the straight waveguide transmission loss show that the straight waveguide transmission loss is about 2.0 dB / cm at the wavelength of 1550 nm. The pass and output spectra of multimode interference structures and devices were tested and obtained. The test results show that the MMI structure achieves a power split ratio close to 50:50 over a wide range of wavelengths. The micro-ring resonator filter has good light transmission performance and realizes the filtering function. The actual FSR value of the free spectral range of the device is about 0.94 nm, very close to the design parameters. The results show that the use of polymer SU-8 to prepare small waveguide waveguide micro-ring resonator device is simple and feasible.