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本文针对平板玻璃蒸发镀膜机中的膜厚分布问题,详细讨论了如何通过合理布置蒸发舟源的空间位置,获得理想均匀的膜厚分布。具体介绍了膜厚计算的模型、公式及计算程序流程图,最佳蒸距的选择和最佳源间距的计算方法,并给出了一些最优化计算的结论、曲线和设计实例,可供设计中参考利用.
In this paper, the issue of film thickness distribution in the flat glass evaporation coating machine is discussed in detail, and how to obtain the ideal uniform film thickness distribution by reasonably arranging the space position of the evaporation boat source. The model of thickness calculation, formulas and flow chart, the best choice of steaming distance and the calculation method of optimal source spacing are introduced in detail, and some conclusions, curves and design examples of optimal calculation are given for designing Reference to use.