在众多的材料中,半导体材料对制作各种传感器有着天然的优越性,因它对光、热、压力、磁场、辐照、湿度、气体、离子等都很敏感,并能以电信号的形式输出。在各种技术中,半导体工艺技术在制作传感器上又有独到之处。目前,传感器正向着微型化、集成化、 Among many materials, semiconductor materials have the natural advantage of making various sensors because they are sensitive to light, heat, pressure, magnetic field, radiation, humidity, gases, ions and the like, and can be in the form of electrical signals Output. In a variety of technologies, semiconductor technology has its own uniqueness in the production of sensors. At present, sensors are moving toward miniaturization, integration,