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本文提出了一种以等厚干涉为基础的光纤Fabry-Perot干涉仪用于测量微位移教学演示仪。微位移通过在压电陶瓷上加不同的电压产生,同时设计了可视化软件操作界面。本干涉演示仪具有结构简单,携带、操作方便,可视化效果好。通过对得到实验结果与压电陶瓷的特性曲线相比可以发现,实验结果与特性曲线一致性好,数值差一个固定的偏移量,通过修正可实现对微位移的准确测量。
In this paper, we present a fiber-optic Fabry-Perot interferometer based on equal thickness interference for the measurement of micro-displacement teaching demonstration instrument. Micro-displacement generated by adding different voltage on the piezoelectric ceramic, while designing a visual software interface. The interference demonstrator has the advantages of simple structure, portability, convenient operation and good visual effect. By comparing the experimental results with those of piezoelectric ceramics, it can be found that the experimental results are in good agreement with the characteristic curves and the values are a fixed offset, and the accurate measurement of micro-displacement can be achieved through correction.