合肥工业大学真空技术及设备教研室,根据半导体感温特性,利用微电子平面工艺,经过三年多的努力,研制成功宽量程半导体真空规。来自全国各地的高等学校、研究所、计量部门及工厂等20多位鉴定会代表,于1985年9月14日至15日在合肥通过技术鉴定。 鉴定会一致认为,合肥工业大学研制 Hefei University of Technology Vacuum Technology and Equipment Department, according to the semiconductor temperature characteristics, the use of micro-planar technology, after three years of hard work, the successful development of wide-range semiconductor vacuum gauge. From more than 20 colleges and institutes, research institutes, measurement departments and factories across the country more than 20 representatives will be in September 14, 1985 to 15 in Hefei passed the technical appraisal. Identification will agree that Hefei University of Technology