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本文介绍了工作于1～67A波谱范围的多靶面低功率软X光源的工作原理、具体结构及实验结果。文章推导了电子束斜入射条件下极值靶电压的计算公式,并详尽地讨论了靶电压的选定。该X光源通过可转动的靶面支承轮,使4个(或8个)不同元素的靶面依次接受高速电子的轰击,从而获得4种(或8种)元素的特征X射线。靶极消耗功率为12mW,无需冷却即能正常工作。文中示出了Al—K_a(8.34A)、C—K_a(44.7A)及B—K_a(67.6A)等特征谱线测试结果。
This paper introduces the working principle, structure and experimental results of a multi-target low-power soft X-ray source working in the 1 ~ 67 A spectral range. In this paper, the formula of extreme target voltage under oblique incident condition of electron beam is derived, and the selection of target voltage is discussed in detail. The X-ray source is capable of receiving four (or eight) different target surfaces with high-speed electron bombardment through a rotatable support surface of the target so as to obtain characteristic X-rays of four (or eight) elements. Target power consumption of 12mW, without cooling that can work properly. The results show that Al-K_a (8.34A), C-K_a (44.7A) and B-K_a (67.6A) are characteristic lines.