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提出采用摆臂式轮廓检测的方法,实现超大口径Si C反射镜面形的高精度轮廓检测。阐述了采用摆臂轮廓仪检测超大口径反射镜的基本原理和具体实施流程;介绍了基于扫描线交点高度一致性的特点进行面形重构的算法,以及针对离焦量测量不准的问题,采用激光跟踪仪对面形离焦量进行辅助测量的手段,建立了综合优化的检测模型;结合实例对口径为2040 mm的同轴抛物面Si C反射镜进行了摆臂轮廓检测,检测精度均方根(RMS)为0.46μm,与干涉仪检测结果对比偏差0.03μm。该技术与加工机床集成实现了反射镜的在位检测,以非球面的最接近球面为测量基准,提供了一种精确、高效地测量超大口径光学非球面面形的方法,满足了大口径Si C反射镜在研磨阶段的高精度轮廓检测需求。
The method of detecting the swing arm contour is proposed to realize the high-precision contour detection of super-large aperture Si C mirror. The basic principle and the specific implementation flow of detecting the large aperture mirror by using the arm profiler are described. The algorithm of reconstructing the surface based on the high consistency of the intersection of the scan lines is introduced. In order to solve the inaccurate measurement of the defocus, A comprehensive and optimized detection model was established by using the laser tracker to measure the defocus amount of the surface shape. The coaxiality paraboloid Si C with a diameter of 2040 mm was used to detect the contour of the arm and the root mean square of detection accuracy (RMS) is 0.46μm, the deviation from the interferometer test results is 0.03μm. The technology integrates with the machine tool to detect the in-position of the mirror. Using the closest aspherical sphere as the measurement reference, this method provides an accurate and efficient method to measure the ultra-large-diameter optical aspherical surface to meet the requirements of the large-aperture Si C-mirror high-precision contouring needs during grinding.