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在试验的基础上提出了测量 Ti N涂层界面结合强度的弹塑性赫兹接触应力经验修正公式 ,作为应用实例测量了不同基体表面粗糙度对磁控溅射沉积的 Ti N涂层界面结合强度的影响 .将测量结果与其它测量方法所得结果进行了比较 ,证明提出的方法切实可行 .
On the basis of the experimental results, an empirical formula of elastic-plastic Hertzian contact stress for measuring the bonding strength of TiN coating was proposed as an example to measure the bonding strength of different substrate surface to the interface of TiN coating deposited by magnetron sputtering The comparison between the measurement results and those obtained by other measurement methods proves that the proposed method is feasible.