论文部分内容阅读
一、概述目前,石英玻璃钻孔的方法有四种,即研磨、电火花、超声波、激光打孔法。研磨打孔法费工时,精度不高,而超声波和激光打孔法适于加工孔径小的零件。因此,石英玻璃的钻孔仍然有一定的局限性,特别是加工较大的孔径,效率低、精度不高。在平板电容器中,石英绝缘垫是起绝缘作用的基准关键零件,需钻φ6~(+0.1)的孔,同轴度为0.05mm,平行度为0.01mm,垂直度为0.02mm,孔光洁度8以上,表面光洁度14,其几何精度高,加工数量大,这是必须解决的关键技术。因此,我们设计了
First, an overview Currently, there are four ways to drill quartz glass, grinding, EDM, ultrasonic, laser drilling method. Grinding drilling method of working hours, accuracy is not high, and ultrasonic and laser drilling method suitable for processing small aperture parts. Therefore, the drilling of quartz glass still has some limitations, especially the processing of large aperture, low efficiency, accuracy is not high. In the flat-panel capacitor, the quartz insulation pad is the reference key part that plays the role of insulation. Drill holes of φ6 ~ (+0.1), coaxiality of 0.05mm, parallelism of 0.01mm, verticality of 0.02mm, and hole finish of 8 Above, the surface finish 14, its high geometric accuracy, processing a large number, which is the key technology must be solved. So we designed it