用反应式射频磁控溅射方法制备了纯氧化锌（ＺｎＯ）薄膜和掺Ａｇ的ＺｎＯ气敏光学传感薄膜。测量了这些薄膜在ＮＯｘ气体中的透射光谱，然后由透射光谱获得了灵敏度的变化规律，发现掺Ａｇ后的ＺｎＯ薄膜对ＮＯｘ气体的灵敏度高于纯ＺｎＯ薄膜，用俄歇电子能谱（ＡＥＳ）测试了这些薄膜的组分，发现当掺Ａｇ量为５％时灵敏度最高。并结合朗缪尔（Ｌａｎｇｍｕｉｒ）型吸附平衡关系式解释了这些现象，理论和实验结果能很好地相符。 Pure zinc oxide (ZnO) thin films and Ag-doped ZnO gas sensing optical thin films were prepared by reactive RF magnetron sputtering. The transmission spectra of these films in NOx gas were measured, and then the variation of the sensitivity was obtained by transmission spectroscopy. The sensitivity of the ZnO films doped with Ag to NOx gas was higher than that of the pure ZnO films. The Auger electron spectroscopy (AES) The composition of these films was tested and it was found that the sensitivity was highest when the Ag content was 5%. These phenomena are explained based on the Langmuir-type equilibrium equation of adsorption, and the theoretical and experimental results are in good agreement.