一、前言精密机械现在主要采用三种导轨:滑动导轨、滚动导轨及静压导轨。滑动和滚动导轨,由于受摩擦磨损、温度、介质等影响,使其运动速度、精度不能太高,寿命也有一定限度,在低速时又会出现“爬行”现象。因此,很难实现高精度快速微动进给运动。液体静压导轨,虽然产生的摩擦力很小,运动平稳无爬行,但是,由于它的工作介质是液体油,需要回收,对工作环境有污染,油温又很难控制,结构比较复杂,不宜产生高速直线运动。使用空气静压导轨,是获得超精密直线运动的最佳新技术之一。特别是在快速微细加工 I. Introduction Precision machinery now mainly uses three kinds of guideways: sliding guide, rolling guide and hydrostatic guideway. Sliding and rolling guide rail, due to friction and wear, temperature, medium and other effects, so that the speed of movement, accuracy can not be too high, life expectancy also has a certain limit, at low speed will appear “crawling” phenomenon. Therefore, it is difficult to achieve high-precision rapid inching motion. Hydrostatic guide, although the friction generated by a small, smooth movement without crawling, but because of its working medium is a liquid oil, need to be recycled, polluting the working environment, the oil temperature is difficult to control, the structure is more complex, not suitable Produce high-speed linear motion. Using air hydrostatic guides is one of the best new technologies for achieving ultra-precision linear motion. Especially in the rapid microfabrication