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采用形状函数法描述变形镜校正时的曲面,从适配误差、Strehl比、加工工艺性三个方面比较了4种不同单元排列方式的微变形镜。结果表明方形排列的微变形镜设计简单,需驱动电压较低,但波前校正性能较差;圆形微变形镜性能最优,但设计复杂,需驱动电压最高。
The shape function method is used to describe the surface of the deformable mirror when it is calibrated. Four kinds of micro-deformable mirrors with different arrangement of cells are compared from three aspects: adaptation error, Strehl ratio and processing technology. The results show that the micro-deformable mirrors with square arrangement are simple in design, low in driving voltage but poor in wavefront correction performance; circular micro-deformable mirror has the best performance, but the design is complicated and the driving voltage is the highest.