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报道了分布布拉格反射镜(DBR)中具有渐变层的垂直腔面发射激光器的研究结果。器件是采用钨丝掩膜两次质子轰击方法制备的。该方法是目前报道的垂直腔面发射激光器制作方法中最简单的。初步的实验已实现室温宽脉冲高占空比激射,最低阈值为18mA,最大峰值功率大于2mW,激射波长为871nm,串联电阻一般为100~200Ω。
The results of a vertical cavity surface emitting laser with a graded layer in a distributed Bragg reflector (DBR) are reported. The device is prepared using a tungsten mask twice proton bombardment method. This method is the simplest in the fabrication method of vertical cavity surface emitting lasers currently reported. Preliminary experiments have been achieved at room temperature wide pulse high duty cycle lasing, the minimum threshold of 18mA, the maximum peak power greater than 2mW, lasing wavelength of 871nm, the series resistance is generally 100 ~ 200Ω.