论文部分内容阅读
为提高以ＧａＡｓ 为基底的中红外探测器的综合性能，从理论上验证了在ＧａＡｓ 基底上镀ＴｉＯ２ ｓｏｌ－ｇｅｌ纳米颗粒膜能够较大幅度地提高ＧａＡｓ 红外透过率，并在实验中获得了适合于镀膜的稳定ＴｉＯ２ 纳米颗粒溶胶，有效控制镀膜工艺参数，在ＧａＡｓ 基底上成功地镀上了合适的ＴｉＯ２ｓｏｌ－ｇｅｌ膜，实现了增透效果，在２．５～６．０μｍ 波段内，透射比的最大值由未镀膜的５６％ 提高到镀膜后的９４％ ．
In order to improve the comprehensive performance of GaAs-based mid-infrared detector, it is theoretically verified that coating TiO2 sol-gel nanoparticle film on GaAs substrate can greatly improve the infrared transmittance of GaAs and obtain in experiment It is suitable for coating stable TiO2 nanoparticle sol and effectively control the coating process parameters. The proper TiO2sol-gel film is successfully plated on GaAs substrate to achieve the enhancement effect. In the range of 2.5-6.0μm, The maximum ratio increased from 56% uncoated to 94% after coating.