微型机械 (包括集微型传感、动作、反馈于一身的微机电系统 )的发展将极大地促进各类先进机械的微型化 ,它将广泛地用于生物医学 (如微外科工具、微量注射等 )、航空航天 (如大型飞机的减阻和快速机动控制等 )、国防、工业、农业、交通、通讯、环保等诸多方面。它的发展会引发 The development of micromachines, including micro-sensing, motion and feedback microelectromechanical systems, will greatly facilitate the miniaturization of a wide range of advanced machinery that will be widely used in biomedical applications such as micro-surgical tools, microinjection, etc. ), Aerospace (such as drag reduction and rapid maneuver control of large aircraft, etc.), defense, industry, agriculture, transportation, communications and environmental protection. Its development will trigger