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介绍了定容式流导法气体微流量校准装置的组成及校准方法,并着重对测量不确定度进行了评定。通过评定在定容式流量计的校准范围(1×10-3~5×10-6)Pa·m3/s内,其合成标准不确定度为1.0%;在固定流导法流量计的校准范围(5×10-6~5×10-11)Pa·m3/s内,其合成标准不确定度为1.4%~1.8%。
This paper introduces the composition and calibration method of gas-flow micro-flow calibrating device based on constant-volume flow guidance method, and evaluates the measurement uncertainty. By standardizing the calibration range (1 × 10-3 ~ 5 × 10-6) Pa · m3 / s for a constant volume flowmeter, the synthetic standard uncertainty is 1.0%. In the calibration of the fixed flowmeter Within the range of (5 × 10-6 ~ 5 × 10-11) Pa · m3 / s, the synthetic standard uncertainty is 1.4% ~ 1.8%.