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本文简要阐述了“逐层”设计方法,并将其用于真空紫外波段高反膜的设计。利用Matlab软件编程设计,计算了50 nm~200 nm波段范围内高反膜系及其反射率。并与同样以熔融石英为基底、不同膜材组合所达到的膜系反射率进行了对比,反射率增大明显。同时计算了实验中出现膜厚误差时对反射率造成的影响。
This article briefly describes the “layer-by-layer” design method and uses it in the design of high-reflective film in the vacuum ultraviolet range. Using Matlab software programming design, high reflectivity and reflectivity in the 50 nm ~ 200 nm band were calculated. And with the same fused silica-based, different film combinations achieved by the contrast of the film system, reflectance increased significantly. At the same time, the effect of the film thickness error on the reflectance was calculated.