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利用自组装和喷覆技术,在单晶硅(Si)表面制备了N-3-(三甲氧基硅烷基)丙基乙二胺(DA)-月桂酰氯(LA)-1-十二烷基-3-甲基咪唑六氟磷酸盐离子液体(ILs)双层自组装分子/离子液体复合润滑薄膜(DA-LA-ILs).采用接触角测量仪、傅里叶变换红外光谱仪(FTIR)和原子力显微镜(AFM)对复合润滑薄膜进行了润湿性能、分子组分、微观形貌和微尺度黏附行为的研究;利用球-盘摩擦磨损试验机研究了该薄膜的摩擦学性能.结果表明:经DA-LA-ILs复合润滑薄膜改性后,有效改善了Si表面的微观黏着性能;同时,相较于DA-LA双层自组装分子膜改性的Si表面和直接由ILs修饰的Si表面,该复合润滑薄膜具有良好的宏观减摩抗磨性能.研究为DA-LA-ILs复合润滑薄膜应用于微机电系统,降低微接触表面的黏着并提高耐磨性能提供了理论依据和试验基础.
N-3- (trimethoxysilyl) propyl ethylenediamine (DA) -lauroyl chloride (LA) -1-dodecyl was prepared on the surface of single crystal Si by self-assembly and spray coating 3-methylimidazolium hexafluorophosphate ionic liquids (ILs) double-layer self-assembled molecularly / ionic liquid composite lubricating films (DA-LA-ILs) were prepared using contact angle measuring instrument, Fourier transform infrared spectroscopy (FTIR) The tribological properties of the films were investigated by atomic force microscopy (AFM) on the wettability, molecular composition, micromorphology and microscale adhesion behavior of the films. The tribological properties of the films were investigated by ball-and-disk friction and wear testing machine. The modification of DA-LA-ILs composite lubricating film can improve the micro-adhesion of Si surface effectively. Meanwhile, compared with the surface modified by DA-LA bilayer self-assembled molecular film and the Si surface directly modified by ILs , The composite lubricating film has good macroscopical anti-friction and anti-wear properties.The research provides a theoretical basis and experimental basis for the DA-LA-ILs composite lubricating film used in MEMS, reducing the adhesion of micro-contact surface and improving the wear resistance.