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针对当前对脉冲激光波面半径测量缺乏有效的测试方法,提出了集大错位与等光程于一体的四平板剪切干涉法,达到对脉冲激光波面半径的高精度测量。R值在30~1000m的范围内,测量误差小于±5%
Aiming at the current lack of effective testing methods for pulsed laser surface radius measurement, a four-plate shear interference method with large offset and equal optical path is proposed to achieve high-precision measurement of pulsed laser surface radius. R value in the range of 30 ~ 1000m, the measurement error is less than ± 5%