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本文主要介绍微弧脉冲等离子焊对微型光刻栅的应用,顺便谈谈栅极表面喷涂碳化钽后再镀铂这一工艺的体会。实践证明,这种栅极的效果较好。
This article describes the application of micro-arc pulse plasma welding micro-scale grating, the way to talk about the gate surface of the coating of tantalum carbide and platinum after this experience. Practice has proved that this gate is better.