【摘 要】
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The minimum spatial resolution of typical optical inspection systems used in the microelectronics industry is generally governed by the classical relations of Ernst Abbe. Kwon et al. show in a new Light:Science and Applications article that using an addit
【机 构】
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College of Engineering,University of South Alabama,Mobile,AL,USA
论文部分内容阅读
The minimum spatial resolution of typical optical inspection systems used in the microelectronics industry is generally governed by the classical relations of Ernst Abbe. Kwon et al. show in a new Light:Science and Applications article that using an additional glass microsphere in the optical path can improve the resolution significantly.
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