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本篇综述SiOx镀膜材料的生产工艺 ,以及影响其性能的各方面因素 ,包括基材性能、基材预处理、工艺条件等
This review summarizes the manufacturing process of SiOx coating materials, as well as various factors that affect their performance, including substrate properties, substrate pretreatment, process conditions, etc.