０引言随着科学技术的发展，各种高效、高分辨率、高可靠性的优质机电一体化传感器不断出现。测试原理先进、测量精度高、性能稳定、跟踪速度快、功耗低、使用寿命长的容栅式直线同步传感器就是其中一种。作为位移量基准元件的容栅式直线同步传感器一出现，就被迅速应用于... 0 Introduction With the development of science and technology, a variety of high efficiency, high resolution, high reliability, high-quality mechatronic sensors continue to appear. Test principle is advanced, high precision, stable performance, fast tracking, low power consumption, long service life capacitance linear rectilinear sensor is one of them. As the displacement of the reference element capacitance-grid linear synchronous sensor appeared, was quickly applied to ...