飞秒激光具有超快、超强的特点.飞秒激光微纳加工发展非常迅速.本文综述了近十年来利用飞秒激光在金属、半导体、介质等各类材料中制备的纳米周期结构,阐述了若干关于飞秒激光诱导纳米周期结构的物理机理的观点.讨论了基于偏振调制的多光束干涉在半导体表面制备纳米周期结构,简要叙述了周期结构对材料光学特性的影响. Femtosecond laser with ultra-fast, super-feat.Few second laser micro-nano processing developed very rapidly.This paper reviewed the use of femtosecond laser in the past decade in metal, semiconductor, medium and other materials prepared nanostructured periodic structure, elaborated A few ideas about the physical mechanism of femtosecond laser-induced nanostructures are discussed, and the preparation of nanostructured nanostructures on semiconductors is discussed based on the polarization modulation of multi-beam interference. The effects of periodic structures on the optical properties are briefly described.