本文综述了利用高分辨电子显微术研究以三种不同工艺制备的纳米固体材料显微结构的结果。用惰性气体凝聚加压法、机械合金化及非晶晶化法制备的纳米晶样品中，多数晶界呈有序结构，但存在程度不等的点阵畸变，在前两种方法制备的样品中，还存在局部无序的晶界区域。晶界的有序程度依次为：非晶晶化法＞惰性气体凝聚加压法＞机械合金化法。用前两种方法制备的样品中还观察到大量的、室温下不常见的形变孪晶。在不同工艺制备的三种样品中，缺陷密度的高低依次为：机械合金化法＞惰性气体凝聚加压法＞非晶晶化法。对于非固溶二元体系，凝聚加压法较难形成明显的亚稳晶体相，而机械合金化法却可获得过饱和固溶的亚稳晶体合金相 This paper reviews the results of high-resolution electron microscopy on the microstructures of nanosolid materials prepared in three different processes. In the nanocrystalline samples prepared by inert gas condensation and pressurization, mechanical alloying and amorphous crystallization, most of the grain boundaries are ordered, but there are some lattice distortions with different degrees. In the samples prepared by the former two methods There is also a locally disordered grain boundary region. Order of grain boundaries in order: Amorphous crystallization> inert gas condensation pressure> mechanical alloying method. A large number of deformation twins, uncommon at room temperature, were also observed in the samples prepared by the first two methods. In the three samples prepared by different processes, the defect densities are as follows: mechanical alloying method> inert gas coalescence and pressure method> amorphous method. For the non-solution binary system, the condensation pressure is more difficult to form a significant metastable crystal phase, but the mechanical alloying method can get supersaturated solid solution of metastable crystal alloy phase