当我们按一般充压法程序,用质谱仪测量器件的漏率时,由于管壳材料的表面或内部缺陷俘获或窝藏的氦气进入探漏仪的分析室中,使得输出表给出的器件指示漏率R不可靠(误差有时可达几个数量级)。其结果,常使我们误将某些密封性良好的器件判为不合格而错误地加以淘汰。对于管壳具有较大缺陷的器件,(如绝缘子内部的非贯穿性气泡或裂纹等(参看图1)即使能侥幸通过细检这一程序,但当用“气泡 When we measure the leak rate of a device with a mass spectrometer as per the normal repressurization procedure, the helium trapped or harmed by the surface or internal defects of the shell material enters the analysis chamber of the leak detector such that the device given in the output table Indicated leak rate R is not reliable (error sometimes up to several orders of magnitude). As a result, we often mistakenly put some of the devices with good sealing as unqualified and mistakenly be eliminated. For devices with large defects in the package, such as non-penetrating air bubbles or cracks inside the insulator (see Figure 1)