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通类金刚石膜是一类性质类似于金刚石的具有多项优质性能的新型膜材料,它的面世是人类膜材料科学的一大进步。由于类金刚石膜的高耐磨性、低摩擦系数、热稳定性、红外透光性、高电阻、低介电常数及生物相容性,适合于多个领域的应用,同时类金刚石膜的制备方法简单,使其引起人们的广泛关注。本文在概述了类金刚石膜的发现、结构和制备方法后,着重描述了多层类金刚石膜在机械、光学、医疗、电子、航天等领域的应用,最后指出它的研究现状和发展前景。
Diamond-like film is a kind of similar to the nature of the diamond with a number of high-quality performance of the new film material, its availability is a major advancement in human membrane materials science. Due to the high wear resistance, low friction coefficient, thermal stability, infrared transmittance, high resistance, low dielectric constant and biocompatibility of diamond-like carbon films, DLC films are suitable for many applications and meanwhile the preparation of DLC films The method is simple, causing it widespread concern. After reviewing the discovery, structure and preparation of diamond-like carbon films, the application of multilayer diamond-like carbon films in mechanical, optical, medical, electronics and aerospace fields is emphatically described. Finally, the research status and development prospects of the diamond-like carbon films are also pointed out.